Pull-in Voltage Study of Various Structured Cantilever and Fixed-Fixed Beam Models using COMSOL Multiphysics
نویسندگان
چکیده
منابع مشابه
Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams
A gap with variable geometry is presented for both cantilever beam and fixed-fixed beam actuators as a method to reduce the pull-in voltage while maintaining a required displacement. The method is applicable to beams oriented either in a plane parallel to or perpendicular to a substrate, but is most suitable for vertically oriented (lateral) beams fabricated with a high aspect ratio process whe...
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ژورنال
عنوان ژورنال: Indian Journal of Science and Technology
سال: 2015
ISSN: 0974-5645,0974-6846
DOI: 10.17485/ijst/2015/v8i14/70698